JPH01171337U - - Google Patents

Info

Publication number
JPH01171337U
JPH01171337U JP6760688U JP6760688U JPH01171337U JP H01171337 U JPH01171337 U JP H01171337U JP 6760688 U JP6760688 U JP 6760688U JP 6760688 U JP6760688 U JP 6760688U JP H01171337 U JPH01171337 U JP H01171337U
Authority
JP
Japan
Prior art keywords
silicon
diaphragm
silicon diaphragm
pressure
strain gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6760688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0628662Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6760688U priority Critical patent/JPH0628662Y2/ja
Publication of JPH01171337U publication Critical patent/JPH01171337U/ja
Application granted granted Critical
Publication of JPH0628662Y2 publication Critical patent/JPH0628662Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP6760688U 1988-05-23 1988-05-23 振動形差圧センサ Expired - Lifetime JPH0628662Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6760688U JPH0628662Y2 (ja) 1988-05-23 1988-05-23 振動形差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6760688U JPH0628662Y2 (ja) 1988-05-23 1988-05-23 振動形差圧センサ

Publications (2)

Publication Number Publication Date
JPH01171337U true JPH01171337U (en]) 1989-12-05
JPH0628662Y2 JPH0628662Y2 (ja) 1994-08-03

Family

ID=31292973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6760688U Expired - Lifetime JPH0628662Y2 (ja) 1988-05-23 1988-05-23 振動形差圧センサ

Country Status (1)

Country Link
JP (1) JPH0628662Y2 (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2568269A2 (en) 2011-08-25 2013-03-13 Yokogawa Electric Corporation Resonant pressure sensor and method of manufacturing the same
CN104422547A (zh) * 2013-08-19 2015-03-18 横河电机株式会社 谐振式压力传感器及其制造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2568269A2 (en) 2011-08-25 2013-03-13 Yokogawa Electric Corporation Resonant pressure sensor and method of manufacturing the same
US9003889B2 (en) 2011-08-25 2015-04-14 Yokogawa Electric Corporation Resonant pressure sensor and method of manufacturing the same
CN104422547A (zh) * 2013-08-19 2015-03-18 横河电机株式会社 谐振式压力传感器及其制造方法
EP2840373A3 (en) * 2013-08-19 2015-04-08 Yokogawa Electric Corporation Resonant pressure sensor and manufacturing method therefor
US11243131B2 (en) 2013-08-19 2022-02-08 Yokogawa Electric Corporation Resonant pressure sensor and manufacturing method therefor
US11835413B2 (en) 2013-08-19 2023-12-05 Yokogawa Electric Corporation Resonant pressure sensor and manufacturing method therefor

Also Published As

Publication number Publication date
JPH0628662Y2 (ja) 1994-08-03

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